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XMCERA | SiC Component For Semiconductor

▼ SiC Introduce

Silicon carbide due to stable chemical properties, high thermal conductivity, small thermal expansion coefficient, good wear resistance, in addition to abrasive, there are many other uses, such as: with a special process of silicon carbide powder coated in the inner wall of the turbine impeller or cylinder body, can improve its wear resistance and extend the service life of 1 ~ 2 times; Used to make advanced refractory materials, shock resistance, small volume, light weight and high strength, good energy saving effect. Low grade silicon carbide (containing SiC about 85%) is an excellent deoxidizer, with it can speed up the speed of steel, and easy to control the chemical composition, improve the quality of steel. In addition, silicon carbide is also widely used in the production of electric heating element silicon carbon rod.

Silicon carbide hardness is very large, Mohs hardness of 9.5, second only to the world’s hardest diamond (10), has excellent thermal conductivity, is a kind of semiconductor, high temperature can resist oxidation.

Pure silicon carbide is colorless, and industrial production of brown to black is due to the impurity of iron. The iridescent sheen of the crystal is due to a protective layer of silica on its surface.
hardness High Hardness High reliability Chemical stability
wear resistance Good wear resistance High strength High thermal conductivity

sic component for wafer 1280 400

▼ Production Process

• synthesis of silicon carbide ceramic powder

Most of the silicon carbide ceramic powder we use at present are artificially synthesized, because natural silicon carbide ceramic powder does not exist on the earth, it only appears in meteorites, and human The use of silicon carbide ceramics is indeed very large, so the work of synthesis is very important.

• sintering of silicon carbide ceramic

After the powder synthesis of silicon carbide ceramics, the sintering of silicon carbide ceramics is carried out by pressing. There are pressureless sintering methods and hot pressing sintering methods used in industry, but hot pressing sintering is the most commonly used. The method is to add certain metal additives, and then realize the densification of silicon carbide ceramic powder through hot pressing and sintering technology, and then add some additives, usually B or B compounds, to make the crystal of silicon carbide The particles become smaller.Sometimes it is also necessary to pay attention to the composition and dosage of sintering additives, which will affect the sintering work and sintering effect to a large extent.

• cooling and shaping

After the sintering of silicon carbide ceramics is completed, it is the cooling work. While cooling, the silicon carbide ceramics can be shaped to a certain extent. Of course, the premise is that the produced silicon carbide ceramics must be shaped. If only If it is to produce its prototype, this step is not required.

▼ Applications Of SiC Component In Semiconductor

As the critical dimensions of semiconductor devices continue to decrease, their sensitivity increases. Modern semiconductor manufacturing plants must take care to keep semiconductors in a completely inert environment and protect them from any possible form of corrosion or chemical attack.

Silicon carbide is an ideal material for semiconductor applications thanks to its extreme chemical inertness. For example, silicon carbide from XMCERA offers extremely high chemical purity (>98%) with no free silicon, alongside superior oxidation resistance even at high temperatures. This makes it ideal for applications in wafer handling and inspection, where eliminating contaminants and preventing unwanted chemical reactions is critical.

application for sic component in semiconductor